Fabrication and evaluation of CVD diamond resonators

Abstract

In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10-13 N/Hz0.5 at 229.3 kHz with 23500 of Q factor. While the crystallites and surface roughness are required to be improved, the patterned diamond resonator can be used as a high sensitive physicochemical sensing tool.