Displacement-amplified dynamic varifocal mirror using mechanical resonance

Abstract

We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.