Structural and Optical Properties of Mn-Doped ZnO Thin Films Prepared by SILAR Method

M. Karunakaran, S. Maheswari, K. Kasirajan, Sivaji Dinesh Raj, R. Chandramohan
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引用次数: 5

Abstract

The growth of highly textured Mn doped Zinc oxide (ZnO) thin films with a preferred (002) orientation has been reported by employing successive ionic layer growth by adsorption reaction (SILAR) using a sodium zincate bath on glass substrates has been reported. The prepared films were characterized by X-ray diffraction (XRD), optical spectroscopy and scanning electron microscopy (SEM) measurement. The XRD analysis reveals that the films were polycrystalline. Morphology of the films was found to be uniform with smaller grains and exhibits a structure with porous. The calculated Band gap value was found to be 3.21 eV prepared at 15 mM MnSO4 concentration.
SILAR法制备mn掺杂ZnO薄膜的结构和光学性质
本文报道了在玻璃衬底上采用连续离子层吸附生长法(SILAR)在锌酸钠浴中生长出具有优选(002)取向的高织构Mn掺杂氧化锌(ZnO)薄膜。采用x射线衍射(XRD)、光谱学和扫描电子显微镜(SEM)对制备的薄膜进行了表征。XRD分析表明薄膜为多晶结构。薄膜的形貌均匀,晶粒较小,具有多孔结构。在15 mM MnSO4浓度下,计算得到带隙值为3.21 eV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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