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Influence of the Li and M (M = V, Nb, Ta, or Zr) Composition Ratio on the Piezoelectric Properties of LiM-doped AlN Films

International journal of the Society of Materials Engineering for Resources Pub Date : 2022-04-30 DOI:10.5188/ijsmer.25.115
T. Terada, J. Kimura, Y. Inoue
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Li和M (M = V, Nb, Ta，或Zr)组成比对掺杂lim的AlN薄膜压电性能的影响
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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International journal of the Society of Materials Engineering for Resources
International journal of the Society of Materials Engineering for Resources
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