Analytical Power for the Sub‐Nanometer World

Abstract

In recent years there has been an ongoing trend to design specialized scanning electron microscopes, dedicated to specific applications. As a result two different system configurations in the SEM market have emerged: One configuration is dedicated to deliver high resolution imaging. The other configuration is dedicated to optimized analytical performance. However, these two diverging development lines force users to decide whether they will limit their research to high resolution imaging or optimized analytical investigations. With the introduction of the new Merlin, Carl Zeiss now has launched an optimized solution fulfilling the requirements for both: the high resolution and the analytical needs. Its imaging system attaining a maximum secondary electron detection resolution of 0.8 nm combines a wealth of analytical capabilities based on a maximum probe current of 300 nA.