Investigation of an Inkjet Printed Optical Resonator as an Environmental Sensor

Netcom Pub Date : 2023-07-30 DOI:10.1109/OMN/SBFotonIOPC58971.2023.10230943

M. Bianki, Régis Guertin, C. Lemieux-Leduc, Y. Peter

引用次数: 0

Abstract

We investigated an inkjet-printed polymer optical resonator as an environmental sensor. The fabrication method combines additive manufacturing and microfabrication techniques to obtain a suspended SU-8 microdroplet on a silicon pillar. Sensitivity for temperature (−41.4 pm/°C) and humidity sensitivity (0.22 pm/ppm) are measured.

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用于环境传感器的喷墨印刷光学谐振器的研究

研究了一种用于环境传感器的喷墨打印聚合物光学谐振器。该制造方法结合了增材制造和微加工技术，在硅柱上获得悬浮SU-8微液滴。温度灵敏度(- 41.4 pm/°C)和湿度灵敏度(0.22 pm/ppm)进行了测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊