Application of asymmetric surface fabricated by femtosecond laser process for microparts feeding

A. Mitani, S. Hirai
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Abstract

Femtosecond laser technology has the ability to form stable minute grating structures on various materials, including silicon wafers and stainless steel. By forming a periodic structure on a surface of sliding parts, the tribology characteristics can be improved, because the effect of adhesion decreases. Application of a double-pulsed femtosecond laser irradiation technique can generate periodic structures with asymmetric profiles. We previously showed that microparts, such as ceramic chip capacitors and resistors, can be fed along asymmetric surfaces using simple planar symmetric vibrations. Microparts move in one direction because they adhere to these surfaces asymmetrically. In this study, we tested the ability of an asymmetric surface microfabricated by a double-pulsed femtosecond laser irradiation technique to feed 0402-type capacitors (size, 0.4 x 0.2 x 0.2 mm; weight, 0.1 mg). Among the characteristics evaluated were the differences in profiles of the two inclined surfaces, the effect of decreased adhesion, the coefficient of friction in both the forward and the backward directions, and the friction angle of the 0402-type capacitors in both directions. Using the results of feeding experiments of these capacitors, we assessed the relationship between driving frequency and feeding velocity.
飞秒激光加工非对称表面在微细零件进给中的应用
飞秒激光技术能够在包括硅片和不锈钢在内的各种材料上形成稳定的微小光栅结构。通过在滑动件表面形成周期性结构,可以改善摩擦特性,因为粘着的影响减小了。应用双脉冲飞秒激光辐照技术可以产生具有非对称轮廓的周期结构。我们之前展示了微部件,如陶瓷芯片电容器和电阻器,可以使用简单的平面对称振动沿着不对称表面馈送。微型部件向一个方向移动,因为它们不对称地附着在这些表面上。在这项研究中,我们测试了通过双脉冲飞秒激光辐照技术微加工非对称表面的能力,以馈送0402型电容器(尺寸,0.4 x 0.2 x 0.2 mm;重量,0.1毫克)。评价了0402型电容器的两个斜面轮廓的差异、粘附降低的影响、前后方向的摩擦系数以及两个方向的摩擦角。利用这些电容器的馈电实验结果,评估了驱动频率与馈电速度之间的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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