{"title":"高温環境下におけるSiN x /SiC y ナノ積層薄膜の自己き裂治癒挙動","authors":"正憲 中谷, 淳樹 西村, 聡 花木, 仁 内田","doi":"10.2472/JSMS.62.634","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17366,"journal":{"name":"journal of the Japan Society for Testing Materials","volume":"62 1","pages":"634-639"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"journal of the Japan Society for Testing Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2472/JSMS.62.634","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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