Influence of oxygen on temperature and electron density of nitrogen microwave plasma

Abstract

The influence of the oxygen content in the range of 0,1-1,2% in the plasma-forming gas, nitrogen, on the characteristics of microwave plasma: temperature and electron density has been studied. The plasma temperature decreases from 4500 to 4390 K with increasing O content, and the electron density decreases from 1,16·10 to 0,85·10 cm.