{"title":"Furnace control using non-thermal parameters (semiconductor growth)","authors":"G. R. Duffill, D. Dunstan","doi":"10.1088/0022-3735/22/8/016","DOIUrl":null,"url":null,"abstract":"Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.","PeriodicalId":16791,"journal":{"name":"Journal of Physics E: Scientific Instruments","volume":"10 1","pages":"617-618"},"PeriodicalIF":0.0000,"publicationDate":"1989-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics E: Scientific Instruments","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0022-3735/22/8/016","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Conventionally, furnaces are controlled by measuring the temperature and processing the data by, for example, a three-term temperature controller. The authors report successful control of a furnace using non-thermal data taken directly from the heated object. The expansion of a sample tube, in a simulation of a horizontal Bridgmann system for growing GaAs in a quartz tube, provided the integral term of a three-term controller.