Quantitative Scanning Transmission Electron Microscopy for Materials Science: Imaging, Diffraction, Spectroscopy, and Tomography

IF 10.6 2区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Annual Review of Materials Research Pub Date : 2023-04-18 DOI:10.1146/annurev-matsci-080921-092646

C. Ophus

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引用次数: 1

Abstract

Scanning transmission electron microscopy (STEM) is one of the most powerful characterization tools in materials science research. Due to instrumentation developments such as highly coherent electron sources, aberration correctors, and direct electron detectors, STEM experiments can examine the structure and properties of materials at length scales of functional devices and materials down to single atoms. STEM encompasses a wide array of flexible operating modes, including imaging, diffraction, spectroscopy, and 3D tomography experiments. This review outlines many common STEM experimental methods with a focus on quantitative data analysis and simulation methods, especially those enabled by open source software. The hope is to introduce both classic and new experimental methods to materials scientists and summarize recent progress in STEM characterization. The review also discusses the strengths and weaknesses of the various STEM methodologies and briefly considers promising future directions for quantitative STEM research. Expected final online publication date for the Annual Review of Materials Research, Volume 53 is July 2023. Please see http://www.annualreviews.org/page/journal/pubdates for revised estimates.

查看原文本刊更多论文

用于材料科学的定量扫描透射电子显微镜:成像、衍射、光谱学和断层扫描

扫描透射电子显微镜(STEM)是材料科学研究中最强大的表征工具之一。由于仪器仪表的发展，如高相干电子源、像差校正器和直接电子探测器，STEM实验可以在功能器件和材料的长度尺度上检查材料的结构和性质，直到单个原子。STEM包括一系列灵活的操作模式，包括成像，衍射，光谱学和3D断层扫描实验。本文概述了许多常见的STEM实验方法，重点是定量数据分析和模拟方法，特别是那些由开源软件实现的方法。希望向材料科学家介绍经典和新的实验方法，并总结STEM表征的最新进展。本文还讨论了各种STEM方法的优缺点，并简要考虑了定量STEM研究的未来发展方向。预计《材料研究年度评论》第53卷的最终在线出版日期为2023年7月。修订后的估计数请参阅http://www.annualreviews.org/page/journal/pubdates。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Annual Review of Materials Research 工程技术-材料科学：综合

CiteScore

17.70

自引率

1.00%

发文量

期刊介绍： The Annual Review of Materials Research, published since 1971, is a journal that covers significant developments in the field of materials research. It includes original methodologies, materials phenomena, material systems, and special keynote topics. The current volume of the journal has been converted from gated to open access through Annual Reviews' Subscribe to Open program, with all articles published under a CC BY license. The journal defines its scope as encompassing significant developments in materials science, including methodologies for studying materials and materials phenomena. It is indexed and abstracted in various databases, such as Scopus, Science Citation Index Expanded, Civil Engineering Abstracts, INSPEC, and Academic Search, among others.