D. Wicaksono, G. Pandraud, G. Craciun, J. Vincent, P. French
{"title":"Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the Campaniform sensillum of insects","authors":"D. Wicaksono, G. Pandraud, G. Craciun, J. Vincent, P. French","doi":"10.1109/ICSENS.2004.1426221","DOIUrl":null,"url":null,"abstract":"In this report, we present our initial fabrication and characterisation results of a new micromachined biomimetic strain sensor. The new strain sensor is structurally inspired from the natural strain sensor found in insects, commonly called Campaniform sensillum. The high-sensitivity strain sensing capability of Campaniform sensillum is among other things due to its hole-structure, as well as its membrane-in-recess structural features. From previous works in continuum macromechanics, it is widely known that hole-structure amplifies stress and mostly becomes a crack starting point. We fabricated for the first time micromachined Si-based strain-sensing structures inspired from these structural features of Campaniform sensillum. In our initial optical characterisation results of these biomimetic Si-based microstructures, it is confirmed that the hole structural feature amplifies and concentrates strain. Thus, further application for a strain-sensing device is feasible.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"58 1","pages":"542-545 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426221","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
In this report, we present our initial fabrication and characterisation results of a new micromachined biomimetic strain sensor. The new strain sensor is structurally inspired from the natural strain sensor found in insects, commonly called Campaniform sensillum. The high-sensitivity strain sensing capability of Campaniform sensillum is among other things due to its hole-structure, as well as its membrane-in-recess structural features. From previous works in continuum macromechanics, it is widely known that hole-structure amplifies stress and mostly becomes a crack starting point. We fabricated for the first time micromachined Si-based strain-sensing structures inspired from these structural features of Campaniform sensillum. In our initial optical characterisation results of these biomimetic Si-based microstructures, it is confirmed that the hole structural feature amplifies and concentrates strain. Thus, further application for a strain-sensing device is feasible.