{"title":"Getter Films for Small Vacuum Chambers","authors":"K. Yatsenko","doi":"10.2174/1874464811306010029","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20875,"journal":{"name":"Recent Patents on Materials Science","volume":"222 1","pages":"29-39"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Recent Patents on Materials Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2174/1874464811306010029","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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