Integrated spectrometer and integrated detectors on Silicon-on-Insulator for short-wave infrared applications

Abstract

We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 μm. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.