A comparative study of capacitive microelectromechanical electrical energy recuperators

Abstract

Electromagnetic processes occurring in different electrical circuits of capacitive microelectromechanical (MEM) mechanical-to-electrical energy converter are analyzed. The converter allows to periodically recover the energy taken from the primary source, and, thus, to operate as MEM electrical energy recuperator. Analytical expressions for evaluation of the charge recuperated to the primary energy source are derived. Dependences of the characteristics of the electrical energy recuperators on the system parameters and architecture are presented.