ZnO nano-rod based hydrogen sensor

Abstract

We report on the fabrication of Zinc Oxide (ZnO) nanorod based H2 sensor using a simple chemical route. ZnO films were deposited on Si substrate followed by annealing and used to detect hydrogen. The surface morphology and crystal structure of the fabricated ZnO system was investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The gas sensing of H2 in the concentration range 0.1-1 vol % in dry air was studied using current-voltage measurements. Gas sensing mechanism is discussed.