Fabrication and measurements using ultra-tall near-field coaxial tips

Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide
{"title":"Fabrication and measurements using ultra-tall near-field coaxial tips","authors":"Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide","doi":"10.1109/MWSYM.2005.1517174","DOIUrl":null,"url":null,"abstract":"We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.","PeriodicalId":13133,"journal":{"name":"IEEE MTT-S International Microwave Symposium Digest, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE MTT-S International Microwave Symposium Digest, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2005.1517174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.
使用超高近场同轴尖端制造和测量
提出了一种高度>50 /spl mu/m的同轴硅尖端微加工新方法。同轴硅尖端作为一个电子小天线。用HP8753D网络分析仪和原子力显微镜(AFM)对微加工同轴尖端芯片进行微波测量。以非接触模式的商用AFM硅探针为样本,演示了超高同轴探针扫描近场微波显微镜(SNMM)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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