Characterization of Micro-heater and Temperature Sensor in Micro-electromechanical System Device for Gas Detection

2018 International Conference on Computer, Control, Electrical, and Electronics Engineering (ICCCEEE) Pub Date : 2018-08-01 DOI:10.1109/ICCCEEE.2018.8515788

M. Ahmed, J. Dennis, M. Khir, A. Rabih

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引用次数: 2

Abstract

Operating temperature is crucial for a Polysilicon Multi-User Micro electro-mechanical system Processes (PolyMUMPs) gas sensor considering the serious impacts on sensors' selectivity and reliability. While it is difficult to measure this operating temperature because the size of the sensor. This paper studies the characterization of micro-heater and temperature sensor made of gold metal, embedded in the device. The measured resistance for the temperature sensor is found to be close to the modelled values within 0.69 % error. Temperature coefficient of resistance (TCR) of the temperature sensor in a range of 25-105°C is found. TCR increases Iinearly with increasing the temperature and decreases Iinearly with decreasing the temperature. It was found to be 0.00326/°C for the increasing temperature and 0.0034/°C for the decreasing temperature, compared to 0.00325/°C reported TCR for gold in the literature, with an error of 4.12% and 4.37%, respectively.

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微机电系统气体检测装置中微加热器和温度传感器的特性研究

工作温度对多晶硅多用户微机电系统工艺(PolyMUMPs)气体传感器的选择性和可靠性有重要影响。而由于传感器的尺寸，很难测量这种工作温度。本文研究了嵌入器件的金金属微加热器和温度传感器的特性。温度传感器的测量电阻与模型值接近，误差在0.69%以内。得到了温度传感器在25 ~ 105℃范围内的电阻温度系数(TCR)。TCR随温度的升高呈线性增加，随温度的降低呈线性降低。与文献报道的金的TCR为0.00325/°C相比，温度升高时TCR为0.00326/°C，温度降低时TCR为0.0034/°C，误差分别为4.12%和4.37%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2018 International Conference on Computer, Control, Electrical, and Electronics Engineering (ICCCEEE)

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