{"title":"The composition and structure of gradient layered coatings: Doped titanium nitride – Dispersion strengthened amorphous carbon","authors":"S. Ovchinnikov, V. A. Slabodchikov, V. Kuznetsov","doi":"10.1063/1.5132125","DOIUrl":null,"url":null,"abstract":"By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.","PeriodicalId":20637,"journal":{"name":"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019","volume":"8 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/1.5132125","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.