Structure and Surface Properties of Magnetron Sputtered Tantalum Oxynitride Coatings for Biomedical Applications

S. Yakovin, S. Dudin, A. Zykova, V. Safonov, T. Kuznetsova, G. Melnikova, A. Petrovskaya, S. A. Chizhik G, N. Donkov
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Abstract

Antimicrobial properties and thrombotic resistance of modern biomaterials depend on the composition and surface properties, such as roughness, topography and wettability. Tantalum oxynitrides demonstrate a wide range of modifications in the structure and elemental composition. Results show the effect of deposition conditions on the structure and surface properties of tantalum oxynitrides and further correlation with the biological response of TaON films in vitro tests.
生物医学用磁控溅射氧化氮化钽涂层的结构和表面性能
现代生物材料的抗菌性能和抗血栓性取决于其组成和表面性能,如粗糙度、地形和润湿性。氧化氮化钽在结构和元素组成上表现出广泛的变化。结果表明,沉积条件对氧化氮化钽薄膜的结构和表面性能有影响,并与TaON薄膜的生物响应有进一步的相关性。
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