Surface quad beam polymer optical accelerometer

Abstract

The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.