Feasibility study of a pressure sensor based on double-ended tuning fork quartz resonator

Abstract

This paper aims to examine the feasibility of a novel resonant pressure sensor, which is realized by introducing a double-ended tuning fork (DETF) quartz resonator into a silicon substrate. Theoretical model and finite element simulation results are given to provide support for the scheme. Sensor prototypes are fabricated based on micromachining technologies. Experimental setup for testing is established to detect the resonant frequency, in which an excitation circuit is designed to drive the quartz resonator into vibration. Preliminary experiment results demonstrate that the non-linearity of the sensor is 0.036%FS while the sensitivity is approximately 452Hz/kPa. The results indicate that this resonant pressure sensor features excellent performances. Therefore, the feasibility of this scheme is basically verified, which provides a solution for low pressure measurement.