F. Fracassi, R. D'agostino, F. Fanelli, A. Fornelli, F. Palumbo
{"title":"GC-MS Investigation of Hexamethyldisiloxane-Oxygen Fed Plasmas","authors":"F. Fracassi, R. D'agostino, F. Fanelli, A. Fornelli, F. Palumbo","doi":"10.1023/A:1026333126452","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20249,"journal":{"name":"Plasmas and Polymers","volume":"8 1","pages":"259-269"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"22","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas and Polymers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1023/A:1026333126452","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}