Measurement of Thermal Properties and Interface Thermal Resistance of Thin Films by Thermoreflectance

Abstract

A three-dimensional heat conduction model is presented, coupled with a frequency-domain thermoreflectance measuring bench. The combination of these tools makes it possible to determine the thermal properties of thin film materials deposited on thick substrates, for a wide range of thermal conductivity and diffusivity. We give an example of experimental determination of the properties of a gold layer, the results of which are compared to the literature. We then present a sensitivity study using simulations for a 200 nm thin layer of polylactic acid, deposited on a silicone substrate and covered by 100 nm of gold.