Research on the calculation method of the ultra-precision turning trajectory of large-vector high-convex cylinders

Q3 Engineering
Lei Rongliang, Li Yun, Lin Wumei, Z. Shuai, Qing Jianhong, Tang Linfeng
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引用次数: 0

Abstract

Array microstructure optical elements are widely used in various beam homogenization occasions, but conventional processing methods cannot meet the accuracy requirements of large-sagittal convex cylindrical arrays. In this paper, the ultra-precision turning forming method is used to analyze the main factors affecting diamond turning, the sequential search method and the binary search method are designed to find the turning track, and the advantages and disadvantages of the two methods are compared. Furthermore, the binary search method is successfully found by combining the Matlab software turning trajectory and the numerical control program. As proof-of-concept demonstrations, turning experiments are carried on an ultra-precision lathe, and a large-vector high-array microstructure with a surface profile error of 135 nm is obtained. It proves that the force binary search method can accurately obtain the turning trajectory, and this method can be applied to both spherical and aspherical contours, showing important engineering application value.
大矢量高凸圆柱超精密车削轨迹计算方法研究
阵列微结构光学元件广泛应用于各种光束均匀化场合,但传统的加工方法无法满足大矢状凸圆柱阵列的精度要求。本文利用超精密车削成形方法分析了影响金刚石车削轨迹的主要因素,设计了顺序搜索法和二叉搜索法来寻找车削轨迹,并比较了两种方法的优缺点。将Matlab软件车削轨迹与数控程序相结合,成功地找到了二叉搜索方法。作为概念验证,在超精密车床上进行了车削实验,获得了表面轮廓误差为135 nm的大矢量高阵列微结构。结果表明,力二叉搜索法能准确地获得车削轨迹,且该方法可适用于球面和非球面轮廓,具有重要的工程应用价值。
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来源期刊
光电工程
光电工程 Engineering-Electrical and Electronic Engineering
CiteScore
2.00
自引率
0.00%
发文量
6622
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