Design and simulation of a nano-scale micro positioning stage

IF 0.6 Q4 AUTOMATION & CONTROL SYSTEMS

International Journal of Modelling Identification and Control Pub Date : 2009-07-14 DOI:10.1504/IJMIC.2009.027019

Xie Xiaohui, Du Ruxu, S. Qiang

引用次数: 1

Abstract

Micro positioning stage is a commonly used platform for MEMS. In this article, we present a new micro positioning stage including its design, simulation and optimisation. The new micro positioning stage is made of four sets of two leaf springs. The geometric dimensions are determined by optimisation. Its performance, including stress and displacement, is evaluated using finite element analysis by ANSYS. The simulation results indicated that the new design can reliably achieve nano position accuracy.

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纳米微定位台的设计与仿真

微定位平台是MEMS常用的平台。本文介绍了一种新型微定位平台的设计、仿真和优化。新型微定位台由四组两片钢板弹簧组成。几何尺寸由优化确定。利用有限元分析软件ANSYS对其受力、位移等性能进行了评价。仿真结果表明，新设计能够可靠地实现纳米定位精度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Modelling Identification and Control AUTOMATION & CONTROL SYSTEMS-

CiteScore

1.70

自引率

57.10%

发文量

期刊介绍： Most of the research and experiments in the fields of science, engineering, and social studies have spent significant efforts to find rules from various complicated phenomena by observations, recorded data, logic derivations, and so on. The rules are normally summarised as concise and quantitative expressions or “models". “Identification" provides mechanisms to establish the models and “control" provides mechanisms to improve the system (represented by its model) performance. IJMIC is set up to reflect the relevant generic studies in this area.