Investigation of the formation of a multilayer functional composite material with a gradient structure titanium nitride – titanium – base

M. A. Sudarchikova
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Abstract

Composite materials based on aluminum alloy D16 and titanium alloy Ti – 10 Nb – 3 Mo with surface layers of titanium, titanium nitride and a multilayer composition consisting of alternating layers of titanium and titanium nitride for biomedical and tribological purposes by high-vacuum magnetron sputtering at direct current in inert and reactive media were obtained. The structure and phase composition were studied using SEM, AES, X-ray diffractometry and probe microscopy. The rate of formation of a surface layer of pure titanium on a substrate made of alloy D16 was 185 nm/min, and the rate of synthesis of a surface layer of titanium in a reactive medium was significantly slowed down and was no more than 70 nm/min due to nitrogen poisoning of the target. The transition layer formed as a result of the synthesis of a titanium layer on an aluminum alloy substrate had a thickness of about 600 nm, which is significantly greater than the thickness of the transition layer when titanium is obtained on a titanium alloy substrate. During the formation of titanium nitride on a titanium sublayer, a greater concentration of nitrogen was observed than during the formation of nitride on a substrate with the same deposition parameters. The intensity of the TiN phase reflexes in the X-ray diffractometry diagrams were weakly expressed in all variants of the applied ratios of working gases Ar/N2 during spraying. The speed of the titanium sublayer makes it possible to form a greater thickness of the titanium nitride layer than without the sublayer, as well as a more nitrogen–saturated surface layer - up to 38% by weight.
氮化钛-钛基梯度结构多层功能复合材料的形成研究
采用直流高真空磁控溅射技术,在惰性介质和反应介质中制备了以钛合金D16和钛合金Ti - 10nb - 3mo为基材,表面为钛和氮化钛,表面为钛和氮化钛交替层的复合材料,用于生物医学和摩擦学研究。采用扫描电子显微镜(SEM)、原子发射光谱(AES)、x射线衍射仪(xrd)和探针显微镜(probe microscopy)对其结构和相组成进行了研究。在D16合金衬底上形成纯钛表面层的速率为185 nm/min,反应介质中钛表面层的合成速率由于靶物的氮中毒而明显减慢,不超过70 nm/min。在铝合金衬底上合成钛层形成的过渡层厚度约为600 nm,明显大于在钛合金衬底上获得钛时的过渡层厚度。在钛亚层上形成氮化钛的过程中,观察到的氮浓度高于在相同沉积参数的衬底上形成氮化钛的过程。x射线衍射图中的TiN相反射强度在喷涂过程中工作气体Ar/N2的应用比例的所有变量中都弱表达。钛子层的速度使得形成比没有子层更厚的氮化钛层成为可能,以及更含氮的表面层-高达重量的38%。
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