Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

IF 0.4 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Electrical Engineering in Japan Pub Date : 2022-02-21 DOI:10.1002/eej.23370

Naotaka Onda, Takaaki Kozuka, Takashi Abe, M. Isshiki, Satoru Tomeno, Masayuki Sohgawa

引用次数: 1

Abstract

The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.

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加热集成MEMS触觉传感器的制造，用于评估触摸玻璃的冷热感觉

本文介绍了一种具有片上加热器和导热弹性体接触部分的对力和温度敏感的MEMS触觉传感器的制造和表征。测量了该传感器与玻璃板接触时由于热传递而产生的温度响应。结果表明，该传感器可以检测到由于玻璃表面处理的不同而产生的热差异。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Electrical Engineering in Japan 工程技术-工程：电子与电气

CiteScore

0.80

自引率

0.00%

发文量

审稿时长

4-8 weeks

期刊介绍： Electrical Engineering in Japan (EEJ) is an official journal of the Institute of Electrical Engineers of Japan (IEEJ). This authoritative journal is a translation of the Transactions of the Institute of Electrical Engineers of Japan. It publishes 16 issues a year on original research findings in Electrical Engineering with special focus on the science, technology and applications of electric power, such as power generation, transmission and conversion, electric railways (including magnetic levitation devices), motors, switching, power economics.