An Embedded Environmental Control Micro-chamber System for RRAM Memristor Characterisation

Abstract

Environmental conditions can greatly affect the performance of semiconductor devices. Great sophistication has thus gone into developing versatile systems that allow benchmarking of operating characteristics under a variety of temperature and humidity conditions. Recently, Resistive Random Access Memory (RRAM) technologies, also known as memristors, have received a lot of attention for memory and computing applications. This interest is showcased by several reports on technology and applications developments, as well as developments on the underpinning infrastructure, i.e. models and characterization tools, that renders such technologies useful. Several international research groups and companies are nowadays using ArC One™, a versatile instrument that allows en masse characterization of RRAM technologies, as has been presented previously in several demo sessions at ISCAS. In this work, we present a newly developed module that expands ArC One™ capabilities through incorporating an environmental control system. The proposed module condenses the functionality of significantly larger, more complex and higher cost systems into a low cost, small form-factor and user friendly desktop-operated device. The system allows for temperature, atmospheric composition and humidity control and can be used for studying the impact of such settings on the electrical characteristics of RRAM technologies.