An analysis of polyharmonic power sources for industrial plasma generators with distributed structure

Abstract

A volume use efficiency of capacitively and inductively coupled low-pressure plasma generators does not exceed 45-50 %. For example, the most widespread kind of reactors-that is cylindrical-in capacitively coupled plasma generators the excitation of plasma has a place at the center of the reactor, and in inductively coupled plasmas-on periphery. According to told, usage of the inductor and the capacitor of the resonator for connection the RF power source with the reactor we receive an opportunity to maintain a discharge in all volume of the reactor, increasing by this the power efficiency of the plasma generator. Combining a principle of hybrid plasma excitation with multiway discharge excitation with use of the distributed source of energy, one can maintain in the reactor with large linear dimensions a uniform plasma torch.