Fluorine‐containing photoreactive polymide 5: A novel positive‐type polyimide based on photoinduced acidolysis

Abstract

Protected polyimide [N(CO) 2 Ph-C(CF 3 ) 2 -Ph(CO) 2 N-Ph(OCOOtBu)-C(CF 3 ) 2 -Ph(OCOOtBu)] n was prepared by polycondensation showed excellent lithographic performance in combination with the photoacid generator