Méthode de détermination des épaisseurs de films conducteurs par mesures de résistance de surface

Abstract

To evaluate the thickness of the layers of a Ti/TiAl₃/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl₃/Al systems.