A study on problem solving strategy using experiment of design

Abstract

This paper presents an approach to solving the problems though the method of design of experiment (DOE). In generally, all problems in semiconductor industry can be summarized as 3 types, called Type X, A and T. The definition is based on whether it's clear for root cause and improvement action of problems. According to the problem types, different solutions are recommended to different problem types for effectively solving the issues. In this paper, we introduced a problem solving strategy to identify the problem types and provided a reasonable solution plan based on DOE method. And one flow is designed in this paper to instruct the problem identification and solution determination. The screening method and optimal design method of DOE are recommended for its wide applications and rigorous statistical theory. Two examples are described to using the flow of real problems solving. The result shows the flow can clearly identify and settle the issues.