Non-contact and automatic test of micro-size work-piece

Abstract

A test system with the CCD matrix and computer is researched to realize 2-D non-contact and automatic measurement. Micro-size rectangle work-piece is tested as example. The experiments show that the absolute precision is less than 3 μm. The instrument possesses the high accuracy and good repeatability, the system may be used in the product line and makes on line testing possible.