P1I-3 FBAR Multi-Layer Resonator for Remote Identification

2007 IEEE Ultrasonics Symposium Proceedings Pub Date : 2007-12-26 DOI:10.1109/ULTSYM.2007.362

V. I. Cherednick

引用次数: 0

Abstract

Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.

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用于远程识别的FBAR多层谐振器

计算了多层Al-AlN FBAR谐振腔的频谱。结果表明，通过层数及其厚度的各种组合可以得到多个频谱。每个频谱都是独立的，可以用于类似于SAW标签的远程识别。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 IEEE Ultrasonics Symposium Proceedings

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