On the Resistivity of Multi-Layer Graphene Nanoribbon Interconnects

Abstract

The effect of substrate surface roughness on the resistivity of graphene nanoribbons (GNRs) and consequently the resistance of multy-layer GNR (MLGNR) interconnects with perfect edges is semiclassically calculated. Results show that besides line edge roughness, the surface roughness of underlying dielectric material can severely increase the resistance of MLGNR interconnects, hence, it must be considered in design considerations.