Spectral and polarization based imaging in deep-ultraviolet excited photoelectron microscopy.

T. Beechem, Sean Smith, R. Copeland, Fangze Liu, T. Ohta
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引用次数: 2

Abstract

Using photoelectron emission microscopy, nanoscale spectral imaging of atomically thin MoS2 buried between Al2O3 and SiO2 is achieved by monitoring the wavelength and polarization dependence of the photoelectron signal excited by deep-ultraviolet light. Although photons induce the photoemission, images can exhibit resolutions below the photon wavelength as electrons sense the response. To validate this concept, the dependence of photoemission yield on the wavelength and polarization of the exciting light was first measured and then compared to simulations of the optical response quantified with classical optical theory. A close correlation between experiment and theory indicates that photoemission probes the optical interaction of UV-light with the material stack directly. The utility of this probe is then demonstrated when both the spectral and polarization dependence of photoemission observe spatial variation consistent with grains and defects in buried MoS2. Taken together, these new modalities of photoelectron microscopy allow mapping of optical property variation at length scales unobtainable with conventional light-based microscopy.
深紫外激发光电子显微镜中基于光谱和偏振的成像。
利用光电子发射显微镜,通过监测深紫外光激发的光电子信号的波长和偏振依赖性,实现了埋在Al2O3和SiO2之间的原子薄MoS2的纳米级光谱成像。虽然光子引起光发射,但由于电子感应到响应,图像可以显示出低于光子波长的分辨率。为了验证这一概念,首先测量了光发射产率与激发光的波长和偏振的关系,然后与用经典光学理论量化的光学响应模拟进行了比较。实验与理论的密切联系表明,光发射直接探测了紫外光与材料堆的光相互作用。当光发射光谱和偏振依赖性观察到与埋藏二硫化钼晶粒和缺陷相一致的空间变化时,证明了该探针的实用性。综上所述,这些光电子显微镜的新模式允许在常规光学显微镜无法获得的长度尺度上绘制光学性质变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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