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The effect of micro-spring stiffness changes on the typical MEMS S&A device

IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2015-01-01 DOI:10.1109/NEMS.2015.7147456
Dakui Wang, W. Lou, Yongjia Xiong, Fufu Wang, Fangyi Liu, Xin Jin, Jun Lu
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研究了微弹簧刚度变化对典型MEMS S&A器件的影响
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems
IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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