Sulfur-Hyperdoped Silicon-Based Flexible Photodetector with Excellent Comprehensive Performance

2020 Conference on Lasers and Electro-Optics (CLEO) Pub Date : 2020-05-01 DOI:10.1364/cleo_at.2020.atu3k.5

Xiaorong Jin, Qiang Wu, Zixi Jia, Song Huang, J. Yao, Jingjun Xu

引用次数: 0

Abstract

The first free-standing flexible photodetector based on sulfur-hyperdoped ultrathin silicon is obtained by femtosecond laser processing. The device described here exhibits excellent comprehensive performance, which surpasses most values reported for flexible Si-based photodetectors.

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综合性能优异的硫超掺杂硅基柔性光电探测器

利用飞秒激光加工技术，获得了首个基于硫超掺杂超薄硅的独立式柔性光电探测器。本文描述的器件具有优异的综合性能，超过了大多数柔性硅基光电探测器的报道值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2020 Conference on Lasers and Electro-Optics (CLEO)

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