Mathematical Modeling of the Fabry-Perot Interferometer Based on Silicon Plates for Application in Microfluid Sensor Devices

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Pub Date : 2019-01-01 DOI:10.1109/eiconrus.2019.8657197

I. M. Pleshanov, Daniyar Sherimov, A. Belorus, V. Koshevoi, O. I. Gorchakov

引用次数: 0

Abstract

In the Mathcad 15 software environment, a 4-mirror Fabry-Perot interferometer for use as a refractive index sensor was simulated. The transmission spectra for various analytes and gaps between silicon wafers are considered and calculated. Optimal areas of maximum sensor sensitivity were determined. As a result of the optimization, sensitivity to a change of the refractive index of up to 1900 nm / RIU was obtained. The perspective of using such a sensor in microfluidic devices is shown.

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基于硅片的法布里-珀罗干涉仪在微流体传感器中的数学建模

在Mathcad 15软件环境中，模拟了用作折射率传感器的四镜法布里-珀罗干涉仪。考虑并计算了各种分析物和硅片间隙的透射光谱。确定了传感器最大灵敏度的最佳区域。结果表明，该系统对折射率变化的灵敏度可达1900 nm / RIU。展望了在微流控器件中应用这种传感器的前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

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