A multi-channel temperature controller for diffusion furnace

Abstract

The paper describes principle of operation, hardware and software of microcomputer system for direct digital control of Diffusion Furnace. The analog-to-digital converter of Multi-Channel Temperature Controller converts signals of 9 analog sensors of temperature and voltage of power line. Data processing includes examination of measurement results credibility, adaptive filtration and calculation of power signals for control of temperature of work zone of Diffusion Furnace. The furnace can be in one of 11 states. Control algorithms are selected according to actual and destinated states of the furnace.