Depth Profiling of Trace Constituents Using Secondary Ion Mass Spectrometry

Abstract

[l] Powell, C. J., Aust. J. Phys. 35. 769 (1982). [2] Powell, C. J., Appl. Surf Sci. 4, 492 (1980). [3] Powell, C. J., J. Vac. Sci. Tech. A 4, 1532 (1986). f4J Bishop, H. E., Chornik, B., Le Gressus, C_. and Le Moe]. A., Surf. Interface Anal. 6, 116 (1984). (5] Doern, F. E., Kover, L., and McIntyre, N. S., Surf Interface Anal. 6, 282 (1984). (61 Powell, C. J., Erickson, N. E., and Madey. T. E., J. Electron. Spectrosc. 17, 361 (1979). [7] Seah, M. P., Jones, M. E., and Anthony, M. T., Surf. lIterface Anal. 6, 242 (1984). [8] Erickson, N. E., and Powell, C. J., Surf Interface Anal. 9. III (1986). [9] Seah, M. P., Surf Interface Anal. 9, 85 (1986). [to] Tanuma, S., Powell, C. J., and Penn, D. R.. Surf Sci. (in press). [11] Powell, C. J., Electronic Materials and Processes. edited by N. H. Kordsmeier, C. A. Harper, and S. M. Lee, Society for the Advancement of Material and Process Engineering, Covina, CA (1987), p. 252. [12] Powell, C. J., Surf. Interface Anal. (in press). Depth Profiling of Trace Constituents Using Secondary Ion Mass Spectrometry