{"title":"Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity","authors":"Shen San-min, Deng Jia-hao, Yan Shu-bin","doi":"10.4172/2090-4886.1000155","DOIUrl":null,"url":null,"abstract":"An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.","PeriodicalId":91517,"journal":{"name":"International journal of sensor networks and data communications","volume":"7 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.4172/2090-4886.1000155","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International journal of sensor networks and data communications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4172/2090-4886.1000155","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.