Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity

Shen San-min, Deng Jia-hao, Yan Shu-bin
{"title":"Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity","authors":"Shen San-min, Deng Jia-hao, Yan Shu-bin","doi":"10.4172/2090-4886.1000155","DOIUrl":null,"url":null,"abstract":"An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.","PeriodicalId":91517,"journal":{"name":"International journal of sensor networks and data communications","volume":"7 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2018-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.4172/2090-4886.1000155","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International journal of sensor networks and data communications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4172/2090-4886.1000155","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.
超高灵敏度光学多环级联腔温度传感器
提出并演示了一种超小型集成光子十阶谐振器温度传感器,并采用先进的MEMS技术制造了一个硅环谐振器。温度变化是通过监测硅谐振腔的十阶谐振波长的位移来测量的,这种位移是由热光效应和热膨胀效应引起的。当波导宽度为450 nm时,获得的最佳灵敏度约为130 pm/°C,微环半径约为5 μm。同时,还报道了基于双赛道环的双通道传感器。
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