Influnce of Filter on Measure Error of Displacement Sensor

Abstract

In order to improve receiving system signal to noise ratio of the laser displacement sensor,people often place receiver filter in front of CCD or PSD.But the filter for receiving light refraction will cause measurement error,the error is non-linear,and can not be ignored by high-precision displacement sensor.We design a compensation method for this non-linear measure error.The experiments show that the method is feasible.