Off-axis aspheric surface measurement by coordinate contour measuring machine

Q4 Physics and Astronomy

光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144004.0339

陈曦 Chen Xi, 郭培基 Guo Peiji, 王建明 Wang Jianming, 仇谷烽 Qiu Gufeng

引用次数: 0

Abstract

A method is proposed to measure off-axis aspherical mirrors with a circular flat base,a rectangular flat base and a family of parallel lines that cut the circular flat base by a coordinate measurement machine(CMM).In response to the base features above,workpiece coordinate system is designed,and the positioning points used to establish the workpiece coordinate system are defined.The 3D-coordinates point-cloud data on the off-axis mirrors are obtained with automatic measurement of single points schema by CMM,and then,the off-axis aspheric surface data processing model for these error corrections is built.Compared with the data by the theoretical model,the surface error of an actual off-axis aspheric surface is obtained.All the pre-polishing processes are guided according to the measurement results.

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坐标轮廓测量机测量离轴非球面

提出了一种利用三坐标测量机(CMM)测量具有圆形平基、矩形平基和与圆形平基相切的平行线的离轴非球面反射镜的方法。针对上述基础特征，设计了工件坐标系，并定义了建立工件坐标系所用的定位点。利用三坐标测量机对单点模式进行自动测量，获得离轴反射镜上的三维坐标点云数据，然后建立误差校正的离轴非球面数据处理模型。通过与理论模型数据的比较，得到了实际离轴非球面的表面误差。所有的预抛光过程都是根据测量结果进行指导的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".