Shape measurement of the cubic phase plate with wavefront sensing technology

Q4 Physics and Astronomy

光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144002.0105

吴青晴 Wu Qingqing, 张晓东 Zhang Xiaodong, 房丰洲 Fang Fengzhou, 张. Z. Lin

引用次数: 0

Abstract

A surface measurement system is designed according to the features of cubic phase plate surface based on wavefront sensing technology.A mapping model from reflected wavefront to surface shape is presented,and in order to measure surface with greater curvature,an algorithm based on image processing method is proposed to improve the dynamic range of the wavefront sensor.Simulation analysis shows that the conversion accuracy of the proposed mapping model is 2~3 times better than traditional algorithm and the dynamic range is increased nearly 4times.Finally,an experimental system is built to measure the surface of an actual cubic phase plate,the result compared with the data achieved by Wyko white light interferometer verifies the correctness and accuracy of the measurement system.

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用波前传感技术测量立方相板的形状

根据三次相板表面的特点，设计了一种基于波前传感技术的表面测量系统。提出了反射波前到曲面形状的映射模型，为了测量曲率较大的曲面，提出了一种基于图像处理方法的波前传感器的动态范围改进算法。仿真分析表明，该映射模型的转换精度比传统算法提高了2~3倍，动态范围提高了近4倍。最后，建立了实际三次相板表面测量实验系统，并与Wyko白光干涉仪测量结果进行了对比，验证了测量系统的正确性和准确性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".