李辉 Li Hui, 吴晓斌 Wu Xiaobin, 韩晓泉 Han Xiaoquan, 马赫 Ma He, 沙鹏飞 Sha Pengfei
{"title":"基于傅里叶合成技术的光刻照明系统研究","authors":"李辉 Li Hui, 吴晓斌 Wu Xiaobin, 韩晓泉 Han Xiaoquan, 马赫 Ma He, 沙鹏飞 Sha Pengfei","doi":"10.3788/cjl221221","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":67323,"journal":{"name":"Chinese Journal of Lasers","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chinese Journal of Lasers","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.3788/cjl221221","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}