Multi-Conceptual Mechanical Design Optimization of Capacitive Pressure Sensors via Finite Element Analysis with use of Anisotropic Behavior of Silicon <111> Crystal: Summary of Design Optimization Approaches
{"title":"Multi-Conceptual Mechanical Design Optimization of Capacitive Pressure Sensors via Finite Element Analysis with use of Anisotropic Behavior of Silicon <111> Crystal: Summary of Design Optimization Approaches","authors":"A. Javidinejad","doi":"10.35248/2168-9873.19.8.317","DOIUrl":null,"url":null,"abstract":"In the world of micro-mechanical design of micro-sensors, up to date, there has not been substantial considerations given to the actual mechanical or structural aspect of the designs. Hence, most of the currently available designs are challenged to linearize the “non-linear” sensor’s output by utilization of electronic circuitry. In this research work, a micro-pressure diaphragm which possess linear pressure-deflection behaviour is designed via FEM optimization techniques. The diaphragm is modelled as a Silicon (111) plane, which possess plane isotropic properties. A circular centre boss section is added to the diaphragm and optimization is carried out, to achieve an optimum diaphragm geometry that would allow for flat or rigid deflection of this boss section under the applied surface pressure loading. The approximate closed−form deflection solutions are developed using the anisotropic thin plate theory and the diaphragm deflection behaviour of the FEM optimized design is compared with this thin plate theory model. This diaphragm design is proposed to be used as the top electrode plate of a capacitive pressure sensor, where linear pressure-capacitance change behaviour would become present. This pressure diaphragm has a pressure range of 0 to 206843 Pa (30 psi) with a pressure resolution of 689.5 Pa (0.1 psi).","PeriodicalId":90573,"journal":{"name":"Journal of applied mechanical engineering","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of applied mechanical engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35248/2168-9873.19.8.317","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In the world of micro-mechanical design of micro-sensors, up to date, there has not been substantial considerations given to the actual mechanical or structural aspect of the designs. Hence, most of the currently available designs are challenged to linearize the “non-linear” sensor’s output by utilization of electronic circuitry. In this research work, a micro-pressure diaphragm which possess linear pressure-deflection behaviour is designed via FEM optimization techniques. The diaphragm is modelled as a Silicon (111) plane, which possess plane isotropic properties. A circular centre boss section is added to the diaphragm and optimization is carried out, to achieve an optimum diaphragm geometry that would allow for flat or rigid deflection of this boss section under the applied surface pressure loading. The approximate closed−form deflection solutions are developed using the anisotropic thin plate theory and the diaphragm deflection behaviour of the FEM optimized design is compared with this thin plate theory model. This diaphragm design is proposed to be used as the top electrode plate of a capacitive pressure sensor, where linear pressure-capacitance change behaviour would become present. This pressure diaphragm has a pressure range of 0 to 206843 Pa (30 psi) with a pressure resolution of 689.5 Pa (0.1 psi).
在微传感器的微机械设计中,迄今为止还没有对设计的实际机械或结构方面进行实质性的考虑。因此,目前大多数可用的设计都面临着利用电子电路对“非线性”传感器输出进行线性化的挑战。本文采用有限元优化技术,设计了一种具有线性压偏特性的微压膜片。膜片被建模为具有平面各向同性的硅(111)平面。在膜片上增加了一个圆形的中心凸台,并进行了优化,以达到最佳的膜片几何形状,允许在施加的表面压力载荷下,该凸台部分的平面或刚性偏转。利用各向异性薄板理论建立了近似闭型挠度解,并将有限元优化设计的膜片挠度特性与薄板理论模型进行了比较。这种膜片设计被提议用作电容式压力传感器的顶极板,其中线性压力-电容变化行为将出现。该压力膜片的压力范围为0至206843 Pa (30 psi),压力分辨率为689.5 Pa (0.1 psi)。