Holographic laser fabrication of 3D artificial compound μ-eyes

Lei Wang, W. Gong, Xiao-wen Cao, Yanhao Yu, S. Juodkazis, Qidai Chen
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Abstract

The demand for fast optical image acquisition without movable optical elements (e.g., for self-driving car technology) can be met using bioinspired 3D compound eyes. 3D laser processing strategies enable designable 3D structuring but suffer from low fabrication efficiency, which significantly limits their applications in producing complex 3D optical devices. Herein, we demonstrate a versatile yet simple wet-etching-assisted holographic laser fabrication method for the development of 3D compound eyes. Artificial compound μ eyes can be readily fabricated by programming a 3D spot array for the parallel ablation of a curved fused silica surface, followed by controllable etching in a hydrofluoric (HF) acid solution. A 3D-concave-lens array made on a curved surface over an area of 100 μ m cross-section with each lenslet of 10 μ m radius was fabricated with high fidelity and excellent imaging/focusing quality. The resultant 3D-concave-lens can serve as a hard template for the mass production of soft compound eyes through soft lithography. Additionally, using a generative adversarial network (GAN)-based deep learning algorithm, image restoration was conducted for each lenslet, which retained a large field of view and significantly improved image quality. This method provides a simple solution to the requirements of compound μ -eyes required by Industry 4.0.
三维人工复合μ眼的全息激光制备
无需移动光学元件(例如自动驾驶汽车技术)的快速光学图像采集需求可以使用仿生3D复眼来满足。三维激光加工策略能够实现可设计的三维结构,但制造效率低,严重限制了其在复杂三维光学器件生产中的应用。在此,我们展示了一种多功能而简单的湿蚀刻辅助全息激光制造方法,用于开发3D复眼。通过编程三维点阵列,对弯曲的熔融二氧化硅表面进行平行烧蚀,然后在氢氟酸溶液中进行可控蚀刻,可以很容易地制备人工复合μ眼。在100 μ m截面的曲面上制作了一个三维凹透镜阵列,每个透镜的半径为10 μ m,具有高保真度和良好的成像/聚焦质量。所得到的三维凹透镜可作为软光刻技术批量生产软复眼的硬模板。此外,使用基于生成式对抗网络(GAN)的深度学习算法,对每个小透镜进行图像恢复,保留了较大的视场,显著提高了图像质量。该方法为工业4.0对复合μ眼的要求提供了一种简单的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
10.90
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