Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography

R. Zvagelsky, Frederik Mayer, D. Beutel, C. Rockstuhl, G. Gomard, M. Wegener
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引用次数: 7

Abstract

In recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures, that is, using ex-situ approaches. In contrast, in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures. Along these lines, we present and characterise a Fourier-domain optical coherence tomography (FD-OCT) system that can be readily integrated into an existing 3D laser lithography setup. We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist. In such samples, local reflectivity arises from the (refractive-index) contrasts between the polymerised and non-polymerised regions. Thus, the refractive index of the printed material can be extracted. Furthermore, we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing. Supported by transfer-matrix calculations, we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix. Finally, we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.
光学相干层析成像用于多光子三维激光打印的原位诊断
近年来,多光子3D激光打印已成为一种广泛应用于微纳米结构制造的工具。通常,彻底的样品表征是有效优化印刷过程的关键。迄今为止,三维显微检查通常是在成品3D打印微观结构上进行的,即使用非原位方法。相比之下,原位3D表征工具对于快速评估3D打印微结构的质量和性能是可取的。沿着这些思路,我们提出并描述了一个傅立叶域光学相干层析成像(FD-OCT)系统,该系统可以很容易地集成到现有的3D激光光刻装置中。我们通过检查浸泡在液体光刻胶中的不同3D打印聚合物微结构来展示其功能。在这些样品中,局部反射率来自聚合区和非聚合区之间的(折射率)对比。因此,可以提取打印材料的折射率。此外,我们证明了聚合物-单体过渡的反射率在印刷后表现出时间依赖的行为。在转移矩阵计算的支持下,我们用源于单体扩散到聚合物基体的随时间变化的梯度指数转变来解释这种效应。最后,我们展示了打印结构的典型3D重建,可以很容易地与3D计算机设计进行比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
10.90
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